Electronic device with microfilm antenna and related methods

ABSTRACT

An electronic device may include a first substrate, an electrically conductive feed line on the first substrate, an insulating layer on the first substrate and the electrically conductive feed line, a second substrate on the insulating layer, and an antenna on the second substrate and having nanofilm layers stacked on the second substrate. The antenna is coupled to the feed line through an aperture.

RELATED APPLICATIONS

This application is a continuation of application Ser. No. 15/589,161filed May 8, 2017, now U.S. Pat. No. 9,881,883, which is based uponapplication Ser. No. 13/755,803, now U.S. Pat. No. 9,679,828, filed Jan.31, 2013, which is based upon prior filed provisional application Ser.No. 61/592,891 filed Jan. 31, 2012, the entire subject matter of whichis incorporated herein by reference in its entirety.

FIELD OF THE INVENTION

The present invention relates to the field of electronic devices, and,more particularly, to electronic devices with integrated antennas andrelated methods.

SUMMARY OF THE INVENTION

In view of the foregoing background, it is therefore an object of thepresent invention to provide electronic device with an integratedantenna that is robust.

This and other objects, features, and advantages in accordance with thepresent invention are provided by an electronic device comprising afirst substrate, an electrically conductive feed line on the firstsubstrate, an insulating layer on the first substrate and theelectrically conductive feed line, a second substrate on the insulatinglayer, and an antenna on the second substrate and comprising a pluralityof nanofilm layers stacked on the second substrate. Advantageously, theantenna may be integrated with other components on the first substrate.

More specifically, the electronic device may comprise an electricallyconductive ground plane layer between the insulating layer and thesecond substrate. The insulating layer and the second substrate maydefine an aperture extending from the first substrate to the antenna forcoupling the electrically conductive feed line to the antenna.

In some embodiments, each of the plurality of nanofilm layers comprisesa carbon nanotube film layer configured to be electrically conductive.The electronic device further may comprise at least one integratedcircuit (IC) component on the first substrate and coupled to theelectrically conductive feed line.

For example, the insulating layer may comprise at least one of a silicondioxide layer and a dielectric laminate layer. The first substrate maycomprise at least one of a silicon layer, and a Gallium Arsenide layer.The second substrate may comprise a silicon layer, and a silicon dioxidelayer.

Another aspect is directed to a method of making an electronic device.The method may comprise forming a first substrate, forming anelectrically conductive feed line on the first substrate, and forming aninsulating layer on the first substrate and the electrically conductivefeed line. The method may also include forming a second substrate on theinsulating layer, and forming an antenna on the second substrate, theantenna comprising a plurality of nanofilm layers stacked on the secondsubstrate.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a schematic diagram of an exploded view of an electronicdevice, according to the present invention.

FIG. 1B is a cross-sectional view of a portion of the electronic deviceof FIG. 1.

FIG. 2 is a flowchart illustrating a method of making the electronicdevice of FIG. 1.

FIGS. 3-4 are charts illustrating performance of an example embodimentof the electronic device of FIG. 1.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention will now be described more fully hereinafter withreference to the accompanying drawings, in which preferred embodimentsof the invention are shown. This invention may, however, be embodied inmany different forms and should not be construed as limited to theembodiments set forth herein. Rather, these embodiments are provided sothat this disclosure will be thorough and complete, and will fullyconvey the scope of the invention to those skilled in the art. Likenumbers refer to like elements throughout.

Referring now to FIGS. 1A-2, an electronic device 10 according to thepresent invention is now described. Also, with reference to flowchart30, a method for making the electronic device 10 is also described,which starts at Block 31. The electronic device 10 includes a firstsubstrate 11, an electrically conductive feed line 12 on the firstsubstrate, and an insulating layer 13 on the first substrate and theelectrically conductive feed line.

The electronic device 10 includes a second substrate 15 on theinsulating layer 13, and an antenna 16 on the second substrate andcomprising a plurality of nanofilm layers 19 a-19 c stacked on thesecond substrate. The first substrate 11 may comprise a silicon layer,or another semiconductor, such as a Gallium Arsenide layer. That is tosay, in some embodiments, the first substrate 11 could comprise solelysilicon or solely Gallium Arsenide, while in others, the GalliumArsenide could comprise a combination thereof. The second substrate 15may comprise a silicon layer, and a silicon dioxide layer.

More specifically, the electronic device 10 includes an electricallyconductive ground plane layer 14 between the insulating layer 13 and thesecond substrate 15. For example, the insulating layer 13 may compriseat least one of a silicon dioxide layer, and a dielectric laminatelayer. In the electronic device 10, the insulating layer 13 and thesecond substrate 15 define an aperture 18 extending from the firstsubstrate 11 to the antenna 16 for coupling the electrically conductivefeed line 12 to the antenna. In particular, the aperture (or via) 18comprises a hallow aperture (i.e. air) for channeling electromagneticwaves, thereby coupling the electrically conductive feed line 12 to theantenna 16.

In some embodiments, each of the plurality of nanofilm layers 19 a-19 ccomprises a carbon nanotube film layer configured to be electricallyconductive. In other embodiments, each of the plurality of nanofilmlayers 19 a-19 c comprises a metallic film layer (e.g. copper, aluminum,iron). The electronic device further comprises an IC component 22 on thefirst substrate 11 and coupled to the electrically conductive feed line12. For example, the IC component 22 may comprise transceiver circuitry,i.e. amplifier, processor, etc. Additionally, each of the plurality ofnanofilm layers 19 a-19 c has a thickness of less than 15 nm, and insome embodiments, less than 10 nm. In other words, this thickness valueis in the nanometer range, ranging from several tens of nanometers to afew nanometers.

Another aspect is directed to a method of making an electronic device10. The method may comprise forming a first substrate 11 (Block 33),forming an electrically conductive feed line 12 on the first substrate(Block 35), and forming an insulating layer 13 on the first substrateand the electrically conductive feed line (Block 37). The method mayalso include forming a second substrate 15 on the insulating layer 13(Block 39), and forming an antenna 16 on the second substrate, theantenna comprising a plurality of nanofilm layers 19 a-19 c stacked onthe second substrate (Blocks 41, 43).

An exemplary embodiment of the electronic device 10 is now described. Areliable and efficient system-on-chip, or an inter-chip wirelessmicrowave or higher frequency data transfer system may necessitate theinternal integration of an antenna with the integrated circuit. Oneapproach to the integrated technique is to fabricate an antennacomprising nanomaterials that are compatible with the materials andfabrication procedure being used to fabricate the integrated circuitchip.

An aperture coupled microstrip antenna, where the active patch iscomposed of ultra-thin metallic nanofilms, such as 10 nm thick iron and15 nm thick aluminum film, as well as vertically grown carbon nanotubes,has been demonstrated to work effectively. Such an antenna structurealso provides an approach to the problems associated with makingreliable direct electrical contacts to nanomaterials.

The antenna structure disclosed herein can be directly integrated intoan IC using the materials used to fabricate the integrated circuit. FIG.1A depicts a sketch of the antenna structure 10. A silicon IC technologyis used in this description for convenience. The same description can beapplied for other fabrication technologies, such as Gallium Arsenidebased ICs.

The feed line connects 12 the IC 22 to the antenna structure 16.Depending on the specific fabrication method, the feed line 12 cancomprise highly doped polysilicon or a metal line, deposited using thetraditional or non-traditional fabrication procedures. On top of thefeed line 12 is a layer of SiO₂ 13, which can be either grown ordeposited. The ground plane 14 can either comprise highly dopedpolysilicon or a metal line, deposited using traditional ornon-traditional procedures. The “aperture” or hole in the ground plane14 is fabricated by etching or pre-defined in the mask used to developthe ground plane. The ground plane 14 is electrically connected to theelectrical ground of the IC 22. On top of the ground plane 14 isdeposited a layer of silicon to form an insulating layer 15.Polysilicon, SiO₂, or even a combination of Si and SiO₂ can also be usedin place. A discussion shortly follows on how a combination of Si andSiO₂ for this layer provides an additional degree of freedom inselecting the frequency of operation for such an antenna.

The patch 16 is the active radiating part of the antenna device 10, andcomprises an ultra-thin metallic nanofilm, deposited using traditionalor non-traditional fabrication procedures. For example, an aluminumfilm, a few nanometers to a few 10's of nanometers can be depositedusing an EvoVac Deposition System, as available from AngstromEngineering, Inc. of Kitchener, Ontario, Canada, where aluminum isthermally evaporated. Of course, other conventional devices that depositthin film layers could be used.

Herein follows the results from simulating the performance of an antennastructure 10 shown in FIG. 1A. For the simulations, the followingdimensions were considered: patch 16: 4.3 mm×5.9 mm; silicon substrate18: 10 mm×10 mm×0.38 mm; silicon dioxide 13: 25 mm×20 mm×0.508 mm;Conducting feeding line: 15 mm×0.972 mm; and through-hole diameter: 0.8mm. For the patch 16, an aluminum thin-film with a thickness of 50 nmwas considered, where a bulk conductivity value of 38 MS/m, relativepermittivity (εr) of 1, and relative permeability (μr) of 1.000021 wereused.

FIG. 3 shows a diagram 50 including a curve 51 for the return loss ofthe antenna 10 as a function of frequency. As can be seen, the antenna10 shows a return loss of over −20 dB at a frequency of 9.2 GHz, whichmakes it an excellent antenna. The frequency of operation of such anantenna can also be changed using the same fabrication technology,without changing the overall dimensions of the antenna. This can beaccomplished through the use of a combination of different silicon basedmaterials for layer 15 in FIG. 1A.

The simulation results are based upon using a combination of Si and SiO₂for layer 15 in FIG. 1A, instead of only Si. In some embodiments, thelayer 15 may comprise Si/SiO₂, and the SiO₂ in layer 13 may comprise RTDuroid (done to demonstrate the effectiveness and versatility ofaperture coupled ultrathin nanofilm antennas). The other materialsremain the same.

FIG. 4 shows a diagram 60 of the return loss as a function of frequencyfor three different scenarios:

1. (curve with circle mark) Layer 15 comprises only of Si with athickness of 0.19 mm. This is done for comparison.

2. (curve with wave mark) Layer 15 comprises Si on top of SiO₂. Each hasa thickness of 0.19 mm (?).

3. (curve with dash mark) Layer 15 is composed of SiO₂ on top of Si.Each has a thickness of 0.19 mm

All other dimensions remain the same as used to obtain the results inFIG. 3. As can be seen, the combination of different Si based materials,instead of only Si, can be used to control the frequency at which theantenna resonates.

Many modifications and other embodiments of the invention will come tothe mind of one skilled in the art having the benefit of the teachingspresented in the foregoing descriptions and the associated drawings.Therefore, it is understood that the invention is not to be limited tothe specific embodiments disclosed, and that modifications andembodiments are intended to be included within the scope of the appendedclaims.

That which is claimed is:
 1. An electronic device comprising: a firstsemiconductor substrate; an electrically conductive feed line on saidfirst semiconductor substrate; an insulating layer on said firstsemiconductor substrate and said electrically conductive feed line; anelectrically conductive ground plane layer on said insulating layer anddefining an aperture; a second semiconductor substrate on saidelectrically conductive ground plane layer and covering said aperture;an antenna on said second semiconductor substrate, said antennacomprising at least one nanofilm layer on said second semiconductorsubstrate, each of said at least one nanofilm layer comprising a carbonnanotube film layer configured to be electrically conductive; saidaperture being hollow and for electrically coupling said electricallyconductive feed line to said antenna; and an integrated circuit (IC)component on said first semiconductor substrate and coupled to saidelectrically conductive feed line.
 2. The electronic device of claim 1wherein said at least one nanofilm layer comprises a plurality ofnanofilm layers.
 3. The electronic device of claim 1 wherein saidinsulating layer comprises at least one of a silicon dioxide layer and adielectric laminate layer.
 4. The electronic device of claim 1 whereinsaid first semiconductor substrate comprises at least one of a siliconlayer and a Gallium Arsenide layer.
 5. The electronic device of claim 1wherein said electrically conductive feed line comprises dopedpolysilicon.
 6. The electronic device of claim 1 wherein saidelectrically conductive feed line comprises a metallic material.
 7. Theelectronic device of claim 1 wherein said second semiconductor substratecomprises silicon and silicon dioxide.
 8. The electronic device of claim1 wherein said second semiconductor substrate comprises a plurality ofdifferent silicon based materials.
 9. The electronic device of claim 1wherein said IC component has an operational frequency of 9.2 GHz; andwherein said aperture has a diameter of 0.8 mm.
 10. The electronicdevice of claim 1 wherein each of said at least one nanofilm layer has athickness of less than 15 nm.
 11. The electronic device of claim 1wherein said IC component comprises transceiver circuity.
 12. Anelectronic device comprising: a first semiconductor substrate; anelectrically conductive feed line on said first semiconductor substrate;a dielectric insulating layer on said first semiconductor substrate andsaid electrically conductive feed line; an electrically conductiveground plane layer on said dielectric insulating layer and defining anaperture; a second semiconductor substrate on said electricallyconductive ground plane layer and covering said aperture; an antenna onsaid second semiconductor substrate, said antenna comprising a pluralityof nanofilm layers on said second semiconductor substrate; said aperturebeing hollow and for electrically coupling said electrically conductivefeed line to said antenna; and an integrated circuit (IC) component onsaid first semiconductor substrate and coupled to said electricallyconductive feed line.
 13. The electronic device of claim 12 wherein eachof said plurality of nanofilm layers comprises a carbon nanotube filmlayer configured to be electrically conductive.
 14. The electronicdevice of claim 12 wherein each of said plurality of nanofilm layerscomprises a metallic film layer.
 15. The electronic device of claim 12wherein said dielectric insulating layer comprises at least one of asilicon dioxide layer and a laminate layer.
 16. The electronic device ofclaim 12 wherein said first semiconductor substrate comprises at leastone of a silicon layer and a Gallium Arsenide layer.
 17. The electronicdevice of claim 12 wherein said electrically conductive feed linecomprises doped polysilicon.
 18. The electronic device of claim 12wherein said electrically conductive feed line comprises a metallicmaterial.
 19. The electronic device of claim 12 wherein each of saidplurality of nanofilm layers has a thickness of less than 15 nm.
 20. Theelectronic device of claim 12 wherein said IC component comprisestransceiver circuity.